Electron beam acquisition device

The embodiment of the utility model provides an electron beam acquisition device, and relates to the technical field of electron beam processing. The electron beam collecting device comprises a transmitting assembly, a deflection assembly, a receiving assembly and a collecting assembly, the deflection assembly is arranged between the transmitting assembly and the receiving assembly, the collectingassembly is arranged on the side, away from the deflection assembly, of the receiving assembly, a receiving hole is formed in the receiving assembly, and the collecting assembly is arranged corresponding to the receiving hole; the emission assembly is used for emitting electron beams; the deflection assembly is used for deflecting the electron beam, so that the electron beam forms a plurality ofbeam spots around the receiving hole of the receiving assembly in sequence; and the acquisition assembly is used for detecting the current of the beam spot passing through the receiving hole so as toobtain the beam current val