Analog quantity conversion output module of vacuum coating evaporation source control device

The utility model relates to an analog quantity conversion output module for a vacuum coating evaporation source control device. The output module comprises a high-speed optical coupler, a digital-to-analog conversion circuit, a reference power supply circuit, four standard voltage output mode circu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAO XIAOMING, KONG LINGGANG, FAN DUOWANG, JIANG QING'AN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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