Substrate processing apparatus

The utility model relates to a substrate processing device, in particular to a substrate processing device for carrying out a liquid medicine coating process on a substrate to be processed, which comprises a substrate supporting part for supporting the substrate; a chemical solution application unit...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	CHO KANG-IL
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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