Substrate processing apparatus

The utility model relates to a substrate processing device, in particular to a substrate processing device for carrying out a liquid medicine coating process on a substrate to be processed, which comprises a substrate supporting part for supporting the substrate; a chemical solution application unit that applies a chemical solution to the substrate; and a pre-drying unit that pre-dries the chemical liquid in a state where the substrate is supported by the substrate support portion, thereby obtaining an effect of preventing outflow of the chemical liquid and forming a chemical liquid coating film having a uniform thickness. 本实用新型涉及一种基板处理装置，对被处理基板进行药液涂覆工艺的基板处理装置包括：基板支撑部，其支撑基板；药液涂覆单元，其将药液涂覆于基板；预干燥单元，其在基板支撑于基板支撑部的状态下，对药液进行预干燥，由此，可获得防止药液流出、形成均匀的厚度的药液涂覆膜的效果。