Pressure relief protection structure of semiconductor aging test equipment

The utility model discloses a pressure relief protection structure of semiconductor aging test equipment, which relates to the technical field of mechanical pressure protection, and comprises a compressed air branch I used for driving a thermal array to move close to a test board, and a compressed a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHOU XUANMING, ZHOU WEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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