Gallium arsenide wafer taking and placing device
The utility model discloses a gallium arsenide wafer taking and placing device. Upper handle, lower handle and connecting shaft, a lower connecting arm is arranged on the left side of the upper handle; a lower handle is arranged below the upper handle; an upper connecting arm is arranged on the left...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a gallium arsenide wafer taking and placing device. Upper handle, lower handle and connecting shaft, a lower connecting arm is arranged on the left side of the upper handle; a lower handle is arranged below the upper handle; an upper connecting arm is arranged on the left side of the lower handle; the upper connecting arm and the lower connecting arm are rotationally connected through a connecting shaft; a rotating seat is arranged in the middle of the upper connecting arm; the mechanism provided by the utility model is simple, reasonable design, clamping of the wafer is realized through cooperative use of the clamping block and the buffer seat; in the wafer clamping process, a flexible force is given to the wafer, so that the impact on the wafer is extremely small, the wafer is effectively prevented from being scratched and damaged, a self-locking device is adopted, the wafer does not need to be clamped with continuous force after being clamped, the wafer is prevented from being d |
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