Novel liquid source bubbler

Novel liquid source bubbler

A novel liquid source bubbler relates to the field of evaporation and vaporization of liquid sources in semiconductor and optical fiber production industries and comprises a bubbler body, the bubblerbody comprises an upper container and a lower container, the bottom end of the upper container is con...

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Hauptverfasser: SHEN YILIN, LIAN HAIZHOU, SUN XIAOYI
Format: Patent
Sprache:chi ; eng
Schlagworte:
BOILING
BOILING APPARATUS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
TRANSPORTING
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creator SHEN YILIN
LIAN HAIZHOU
SUN XIAOYI
description A novel liquid source bubbler relates to the field of evaporation and vaporization of liquid sources in semiconductor and optical fiber production industries and comprises a bubbler body, the bubblerbody comprises an upper container and a lower container, the bottom end of the upper container is connected with the top end of the lower container, and the diameter of the upper container is larger than that of the lower container; the sealing cover is used for sealing the opening in the top of the bubbler body; the carrier gas input pipe penetrates through the sealing cover from the top and extends to the bottom of the accommodating cavity of the lower container; the annular pipe is communicated with the carrier gas input pipe and is horizontally arranged at the bottom of the accommodating cavity of the lower container, and a plurality of micropores are uniformly formed in the lower part of the annular pipe; and the liquid source steam outlet is formed in the sealing cover. The novel liquid source bubbler is mor
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subjects BOILING
BOILING APPARATUS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
TRANSPORTING
title Novel liquid source bubbler
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