SUBSTRATE LIQUID TREATMENT APPARATUS

The utility model provides a substrate liquid treatment device. The present utility model prevents droplets of a treatment liquid that has scattered from the surface of the treatment liquid in an inner tank from scattering to an unexpected region outside the inner tank. The substrate liquid processi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MASUTOMI HIROYUKI, IKEDA TAKASHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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