Ion beam cross section ion concentration measurement system

The utility model provides an ion beam cross section ion concentration measurement system, include: ion beam, a faraday cup, the 2nd faraday cup and data processor, at the ascending faraday cup of X axle, and with the two ascending faraday cup on the Y axle of X axial quadrature, the actual distribution of reflection ion beam that can be accurate for the accurate optimization ion beam of staff's ability, thereby the time of optimizing the ion beam that has shortened, the qualities of the wafer of follow -up preparation are improved, be favorable to the judgement to unusual ion beam or incident. 本实用新型提供种离子束横截面离子浓度检测系统，包括：离子束、第法拉第杯、第二法拉第杯及数据处理器；在X轴向上的第法拉第杯，及与X轴向正交的Y轴向上的第二法拉第杯，可准确的反映离子束的实际分布状态，使得工作人员能准确的优化离子束，从而缩短了优化离子束的时间；提高后续制备的晶圆质量；有利于对异常离子束或事件的判断。