Wandering star wheel that chemically mechanical polishing used

The utility model provides a wandering star wheel that chemically mechanical polishing used, including the wheel body, its main improvement part lies in, the wheel body includes upper wheel body and lower floor's wheel body, at the middle baffle that is equipped with of upper and lower two -lay...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: HUANG RONGYAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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