Wandering star wheel that chemically mechanical polishing used

The utility model provides a wandering star wheel that chemically mechanical polishing used, including the wheel body, its main improvement part lies in, the wheel body includes upper wheel body and lower floor's wheel body, at the middle baffle that is equipped with of upper and lower two -layer wheel body, respectively leave the recess in upper and lower two -layer wheel body, be equipped with the absorption liner in the recess, place the wafer in adsorbing the liner during use, the recess blocks the wafer in the border all around, all be equipped with the trompil on upper wheel body and lower floor's wheel body, the trompil does not run through wandering star wheel, but only opens upper wheel body and lower floor wheel body bottom, and the centre has the baffle to stop. The position that this wandering star wheel placed the wafer is not the through -hole of offering, but respectively establishes a recess from top to bottom at the wandering star wheel wheel body, and there is the absorption liner the inside