A device that is used for carrier and said carrier of supporting substrate

The utility model provides a carrier (100) that is used for handling the cavity medium counts at the base plate and props base plate (200). The carrier includes: frame (110), the frame is configured as and is used for receiving substrate (200), and base plate fixing subassembly (120), base plate fixing subassembly is configured as and is used for vertically to the base plate fixing is in in frame (110). Base plate fixing subassembly (120) is including position indicator unit (140), the position indicator unit be used for instructing the base plate for the position of frame, wherein position indicator unit (140) can for remove frame (110). 本实用新型提供种用于在基板处理腔室中支撑基板(200)的载体(100)。所述载体包括：框架(110)，所述框架被配置成用于接收基板(200)；以及基板固持组件(120)，所述基板固持组件被配置成用于竖直地将所述基板固持在所述框架(110)内。基板固持组件(120)包括位置指示单元(140)，所述位置指示单元用于指示基板相对于所述框架的位置，其中所述位置指示单元(140)可相对于所述框架(110)移动。