Bottom ring flange dismounting device of long -range plasma system

The utility model discloses a bottom ring flange dismounting device of long -range plasma system, including location fixed bolster, ring flange connecting piece and motion rotary screw, the location fixed bolster has support plane and a connected a plurality of supporting legs, supporting legs be us...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU DONGSHENG, ZHU JUN, PENG GUOFA, LYU YUKUN, ZHANG XUSHENG, LONG JUN, JIANG SENLIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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