Fluxgate probe based on MEMS technique

The utility model discloses a fluxgate probe based on MEMS technique, the fluxgate probe is including the silicon dioxide based body, excitation coil, induction coil, magnetic core, bonding conductor, pin and polyimide material, the magnetic core is closed rectangle magnetic core, and the separated...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Wang Chunpei, Zhi Menghui, Qiao Donghai
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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