Fluxgate probe based on MEMS technique

The utility model discloses a fluxgate probe based on MEMS technique, the fluxgate probe is including the silicon dioxide based body, excitation coil, induction coil, magnetic core, bonding conductor, pin and polyimide material, the magnetic core is closed rectangle magnetic core, and the separated two sets of three -dimensional solenoid excitation coil of coiling of long limit one side symmetry of magnetic core, the long limit opposite side of magnetic core are equipped with the three -dimensional solenoid induction coil with the parallel coiling of excitation coil, the magnetic core is located inside the polyimide material, excitation coil and induction coil are all through polyimide material and magnetic core insulated isolation, excitation coil and induction coil all are located on the silicon dioxide based body to both ends all link to each other with the pin. The utility model discloses MEMS's preparation process has been simplified, problem that the upper and lower layer line circle of still having sol