Semiconductor inspection automatic marking device

The utility model discloses a semiconductor inspection automatic marking device, including the microscope, the inspection platform, a pedestal, the movable plate, linear electric motor, the lead screw, the mark subassembly, linear electric motor drives the movable plate through the lead screw and is...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHI YONGHONG, ZHAO CONGSHOU, WANG MINGHUI, TAO PEI, LI HONGTU, ZHOU GENQIANG, PENG YONG
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model discloses a semiconductor inspection automatic marking device, including the microscope, the inspection platform, a pedestal, the movable plate, linear electric motor, the lead screw, the mark subassembly, linear electric motor drives the movable plate through the lead screw and is linear motion, set for linear electric motor turned angle, make every first button or second button operated, the distance that the movable plate drove the microscope removal equals interval between two wafers bodies, when the operating personnel discovery has the unqualified wafer of bonding wire to personally experience sth. Part of the body, press the third button, directly over linear electric motor drive mark subassembly removes and personally experiences sth. Part of the body to the unqualified wafer of bonding wire, cylinder drive marker pen moves down and carries out the mark to the wafer body, after marker pen triggers travel switch, the cylinder drives the marker pen upward movement, the movable plate of linear electric motor drive simultaneously returns to initial position. The device simple structure, the mark is carried out to automatic personally experiencing sth. Part of the body to the unqualified wafer of bonding wire, and spill tag note or repeating label, greatly reduced operating personnel intensity of labour can not take place for operating personnel.