Powder metallurgy diffusion welding target

The utility model discloses a powder metallurgy diffusion welding target which is in a structure of a powder metallurgy target and a Mo or Mo alloy back plate, or a powder metallurgy target, a transition layer and a Mo or Mo alloy back plate, wherein the layers are in diffusion welding. The powder m...

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Hauptverfasser: LI YONGJUN, SUN XIULIN, YU HAIYANG, ZHANG YULI, LYU CHAO, DING ZHAOCHONG
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Sprache:eng
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creator LI YONGJUN
SUN XIULIN
YU HAIYANG
ZHANG YULI
LYU CHAO
DING ZHAOCHONG
description The utility model discloses a powder metallurgy diffusion welding target which is in a structure of a powder metallurgy target and a Mo or Mo alloy back plate, or a powder metallurgy target, a transition layer and a Mo or Mo alloy back plate, wherein the layers are in diffusion welding. The powder metallurgy target is made of W or a W alloy, Cr or a Cr alloy, and Ru or a Ru alloy; the transition layer is made of Ti or a Ti alloy, and Mo or a Mo alloy and is 0.1-5mm in thickness; and a Mo alloy of the back plate is Mo-W, Mo-Ta or Mo-Ti. According to the powder metallurgy diffusion welding target, a welded target component has small deformation entirely and does not crack, the target is high in reliability, the tensile strength of welding is high, a welded rate is high, and use requirements of high-power sputter coating can be met.
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The powder metallurgy target is made of W or a W alloy, Cr or a Cr alloy, and Ru or a Ru alloy; the transition layer is made of Ti or a Ti alloy, and Mo or a Mo alloy and is 0.1-5mm in thickness; and a Mo alloy of the back plate is Mo-W, Mo-Ta or Mo-Ti. 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subjects CHEMICAL SURFACE TREATMENT
CHEMISTRY
CLADDING OR PLATING BY SOLDERING OR WELDING
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING
DIFFUSION TREATMENT OF METALLIC MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
MACHINE TOOLS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
METALLURGY
PERFORMING OPERATIONS
SOLDERING OR UNSOLDERING
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
TRANSPORTING
WELDING
WORKING BY LASER BEAM
title Powder metallurgy diffusion welding target
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