Powder metallurgy diffusion welding target

The utility model discloses a powder metallurgy diffusion welding target which is in a structure of a powder metallurgy target and a Mo or Mo alloy back plate, or a powder metallurgy target, a transition layer and a Mo or Mo alloy back plate, wherein the layers are in diffusion welding. The powder m...

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Bibliographische Detailangaben
Hauptverfasser:	LI YONGJUN, SUN XIULIN, YU HAIYANG, ZHANG YULI, LYU CHAO, DING ZHAOCHONG
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY CLADDING OR PLATING BY SOLDERING OR WELDING COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY PERFORMING OPERATIONS SOLDERING OR UNSOLDERING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	The utility model discloses a powder metallurgy diffusion welding target which is in a structure of a powder metallurgy target and a Mo or Mo alloy back plate, or a powder metallurgy target, a transition layer and a Mo or Mo alloy back plate, wherein the layers are in diffusion welding. The powder metallurgy target is made of W or a W alloy, Cr or a Cr alloy, and Ru or a Ru alloy; the transition layer is made of Ti or a Ti alloy, and Mo or a Mo alloy and is 0.1-5mm in thickness; and a Mo alloy of the back plate is Mo-W, Mo-Ta or Mo-Ti. According to the powder metallurgy diffusion welding target, a welded target component has small deformation entirely and does not crack, the target is high in reliability, the tensile strength of welding is high, a welded rate is high, and use requirements of high-power sputter coating can be met.