Silicon wafer cleaning waste water recycling and reusing device
The utility model discloses a silicon wafer cleaning waste water recycling and reusing device, which comprises a recycling device, a pre-cleaning machine, a glue digestion groove, an ultrasonic water tank and a filter screen, wherein the recycling device is respectively connected with the pre-cleani...
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| creator | ZHANG JIAN DI HONGXIANG JIN DAXING |
| description | The utility model discloses a silicon wafer cleaning waste water recycling and reusing device, which comprises a recycling device, a pre-cleaning machine, a glue digestion groove, an ultrasonic water tank and a filter screen, wherein the recycling device is respectively connected with the pre-cleaning machine, the glue digestion groove, the ultrasonic water tank and the filter screen by pipelines; the recycling device comprises a water pump for pumping waste water, generated after silicon wafer cleaning, into a water storage tank, the water storage tank and a distribution water pump; the water pump, the water storage tank and the distribution water pump are sequentially connected through pipelines. According to the silicon wafer cleaning waste water recycling and reusing device, the waste water generated after silicon wafer cleaning is recollected for other cleaning steps, so that the water is saved, meanwhile, the cost for water heating before other cleaning steps is also reduced, not only is the work efficiency of the equipment improved, but also the consumption of the electric energy is reduced, and the production cost is reduced for workshops. |
| format | Patent |
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According to the silicon wafer cleaning waste water recycling and reusing device, the waste water generated after silicon wafer cleaning is recollected for other cleaning steps, so that the water is saved, meanwhile, the cost for water heating before other cleaning steps is also reduced, not only is the work efficiency of the equipment improved, but also the consumption of the electric energy is reduced, and the production cost is reduced for workshops.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CLEANING</subject><subject>CLEANING IN GENERAL</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>PERFORMING OPERATIONS</subject><subject>PREVENTION OF FOULING IN GENERAL</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2015</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLAPzszJTM7PUyhPTEstUkjOSU3My8xLB3KLS1KBZAlQsCg1uTI5BySamJcC5JUWg9gpqWWZyak8DKxpiTnFqbxQmptByc01xNlDN7UgPz61uCAxOTUvtSTe2c_IwMTA3MTU0jw01JgoRQD_ujHU</recordid><startdate>20150107</startdate><enddate>20150107</enddate><creator>ZHANG JIAN</creator><creator>DI HONGXIANG</creator><creator>JIN DAXING</creator><scope>EVB</scope></search><sort><creationdate>20150107</creationdate><title>Silicon wafer cleaning waste water recycling and reusing device</title><author>ZHANG JIAN ; DI HONGXIANG ; JIN DAXING</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN204074597UU3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2015</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CLEANING</topic><topic>CLEANING IN GENERAL</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>PERFORMING OPERATIONS</topic><topic>PREVENTION OF FOULING IN GENERAL</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>ZHANG JIAN</creatorcontrib><creatorcontrib>DI HONGXIANG</creatorcontrib><creatorcontrib>JIN DAXING</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ZHANG JIAN</au><au>DI HONGXIANG</au><au>JIN DAXING</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Silicon wafer cleaning waste water recycling and reusing device</title><date>2015-01-07</date><risdate>2015</risdate><abstract>The utility model discloses a silicon wafer cleaning waste water recycling and reusing device, which comprises a recycling device, a pre-cleaning machine, a glue digestion groove, an ultrasonic water tank and a filter screen, wherein the recycling device is respectively connected with the pre-cleaning machine, the glue digestion groove, the ultrasonic water tank and the filter screen by pipelines; the recycling device comprises a water pump for pumping waste water, generated after silicon wafer cleaning, into a water storage tank, the water storage tank and a distribution water pump; the water pump, the water storage tank and the distribution water pump are sequentially connected through pipelines. 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| subjects | BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING |
| title | Silicon wafer cleaning waste water recycling and reusing device |
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