Solid metal organic compound encapsulation container series system
The utility model relates to a solid metal organic compound encapsulation container series system which comprises multiple containers and a main series member. The container is provided with a containing space for containing solid metal organic compounds, a gas inlet pipe with a gas inlet valve, a g...
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| creator | LU PING WANG PING GAO LEI SHEN BIN SHAN YIJING WEI JINHAO LYU BAOYUAN |
| description | The utility model relates to a solid metal organic compound encapsulation container series system which comprises multiple containers and a main series member. The container is provided with a containing space for containing solid metal organic compounds, a gas inlet pipe with a gas inlet valve, a gas outlet pipe with a gas outlet valve and a transverse connection pipe with a transverse valve, wherein the transverse connection pipe is connected between the gas inlet pipe and the gas outlet pipe; multiple containers are connected in series by connecting the gas inlet pipe of one container with the gas outlet pipe of another container by the series pipe; the unconnected gas inlet pipe and gas outlet pipe are connected with the metal organic chemical vapor deposition processing equipment. The series set is used for containing the containers. Therefore, the system provided by the utility model can improve the utilization efficiency of the solid metal organic compounds and reduce the waste of the remaining solid m |
| format | Patent |
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The container is provided with a containing space for containing solid metal organic compounds, a gas inlet pipe with a gas inlet valve, a gas outlet pipe with a gas outlet valve and a transverse connection pipe with a transverse valve, wherein the transverse connection pipe is connected between the gas inlet pipe and the gas outlet pipe; multiple containers are connected in series by connecting the gas inlet pipe of one container with the gas outlet pipe of another container by the series pipe; the unconnected gas inlet pipe and gas outlet pipe are connected with the metal organic chemical vapor deposition processing equipment. The series set is used for containing the containers. Therefore, the system provided by the utility model can improve the utilization efficiency of the solid metal organic compounds and reduce the waste of the remaining solid m</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
| recordid | cdi_epo_espacenet_CN203782229UU |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Solid metal organic compound encapsulation container series system |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-11T15%3A11%3A50IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=LU%20PING&rft.date=2014-08-20&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN203782229UU%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |