Epitaxial wafer base disc

The utility model discloses an epitaxial wafer base disc which comprises a disc body, a central containing groove and containing grooves. The epitaxial wafer base disc is characterized in that the central containing groove is formed in the center of the disc body; the containing grooves are uniforml...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN HAOZHONG, LIN XIHAN, DENG SHUNDA
Format: Patent
Sprache:chi ; eng
Schlagworte:
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