Coating-preventing inspection window of vacuum coating chamber
The utility model discloses a coating-preventing inspection window of a vacuum coating chamber. The coating-preventing inspection window comprises an inspection window small neck communicated with the vacuum coating chamber, wherein the inspection window small neck is provided with a flange; the fla...
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| creator | GUAN BINGYU |
| description | The utility model discloses a coating-preventing inspection window of a vacuum coating chamber. The coating-preventing inspection window comprises an inspection window small neck communicated with the vacuum coating chamber, wherein the inspection window small neck is provided with a flange; the flange is provided with left and right flange discs, the inner side walls of the left and right flange discs can form a cavity chamber, the cavity chamber is internally provided with a baffle, and the lower part of the flange is provided with a round quartz glass inspection window; the baffle is a round thin plate, the corresponding cavity chamber is a round cavity chamber, and the baffle is provided with two symmetrical strip-type slits along a radial direction, the center position of the baffle is provided with a revolving shaft, and the revolving shaft is connected with a driving motor; the lengths of the slits and the radial dimension of the quartz glass inspection window are same, when the baffle rotates to one a |
| format | Patent |
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The coating-preventing inspection window comprises an inspection window small neck communicated with the vacuum coating chamber, wherein the inspection window small neck is provided with a flange; the flange is provided with left and right flange discs, the inner side walls of the left and right flange discs can form a cavity chamber, the cavity chamber is internally provided with a baffle, and the lower part of the flange is provided with a round quartz glass inspection window; the baffle is a round thin plate, the corresponding cavity chamber is a round cavity chamber, and the baffle is provided with two symmetrical strip-type slits along a radial direction, the center position of the baffle is provided with a revolving shaft, and the revolving shaft is connected with a driving motor; the lengths of the slits and the radial dimension of the quartz glass inspection window are same, when the baffle rotates to one a</description><language>chi ; eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2014</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140226&DB=EPODOC&CC=CN&NR=203451612U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140226&DB=EPODOC&CC=CN&NR=203451612U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>GUAN BINGYU</creatorcontrib><title>Coating-preventing inspection window of vacuum coating chamber</title><description>The utility model discloses a coating-preventing inspection window of a vacuum coating chamber. 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The coating-preventing inspection window comprises an inspection window small neck communicated with the vacuum coating chamber, wherein the inspection window small neck is provided with a flange; the flange is provided with left and right flange discs, the inner side walls of the left and right flange discs can form a cavity chamber, the cavity chamber is internally provided with a baffle, and the lower part of the flange is provided with a round quartz glass inspection window; the baffle is a round thin plate, the corresponding cavity chamber is a round cavity chamber, and the baffle is provided with two symmetrical strip-type slits along a radial direction, the center position of the baffle is provided with a revolving shaft, and the revolving shaft is connected with a driving motor; the lengths of the slits and the radial dimension of the quartz glass inspection window are same, when the baffle rotates to one a</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Coating-preventing inspection window of vacuum coating chamber |
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