Whisker column growth device with multiple upper furnace chambers

The utility model relates to a whisker column growth device with multiple upper furnace chambers. The whisker column growth device comprises a base, a lower furnace chamber, a lifting and rotating device and at least two upper furnace chambers. The upper furnace chambers are respectively provided wi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG KEYAO, ZHOU HANZHANG, YAN XIANRUI, LU SULONG, BAO RUISI, JIANG ZHIYUAN, LIN YANZHANG, LAI HONGNENG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model relates to a whisker column growth device with multiple upper furnace chambers. The whisker column growth device comprises a base, a lower furnace chamber, a lifting and rotating device and at least two upper furnace chambers. The upper furnace chambers are respectively provided with a crystal puller and capable of implementing whisker column growth process, when one of the upper furnace chambers completes whisker column growth process and waits for cooling whisker columns, another upper furnace chamber can be used for continuing to realize the growth process of the next whisker column, and waiting time for cooling the whisker column can be utilized effectively, thereby improving production efficiency and energy resource utilization ratio of the whisker column growth device.