Quartz square box

The utility model relates to a quartz square box, in particular to a quartz product of an integrated-circuit chip manufacturing industry, belonging to the microelectronics industry. The quartz product comprises an internal cleaning tank and an external liquids collecting tank, and is characterized i...

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Bibliographische Detailangaben
Hauptverfasser: WANG FULONG, YANG JISHENG, WEI DONGHAN, XING YU, ZHANG ZHONGSHU, CHEN QIANG, LU BINGYI, LIU NIANYUN, LIU ZENG, ZHANG LIANXING, LIU WENJING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model relates to a quartz square box, in particular to a quartz product of an integrated-circuit chip manufacturing industry, belonging to the microelectronics industry. The quartz product comprises an internal cleaning tank and an external liquids collecting tank, and is characterized in that an overflow groove opening is formed on the top edge of the internal cleaning tank, and the liquid collecting tank is fixed on the periphery at the upper part of the cleaning tank. In the quartz square box, the overflow groove opening is designed in the cleaning tank, therefore, the overflowed cleaning liquids can smoothly flows to the liquid collecting tank, the positioning structural design is simple, and the coordination with the product line is good; and the design for the quartz square box is reasonable, and can excellently coordinate with the product line to carry out high-intensity workload cleaning.