Wet etching equipment
The utility model provides wet etching equipment which comprises an etching groove, a gate, a fluid dropping device and a flow deflector, wherein the etching groove is provided with an opening, a base plate enters the etching groove through the opening, and the opening is positioned on one side wall...
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| creator | LIAO QINSHENG OUYANG ZHISHENG YAO YANGYU CHEN JIANTONG |
| description | The utility model provides wet etching equipment which comprises an etching groove, a gate, a fluid dropping device and a flow deflector, wherein the etching groove is provided with an opening, a base plate enters the etching groove through the opening, and the opening is positioned on one side wall of the etching groove; the gate is arranged at the opening and provided with a door plate used for shielding and exposing the opening, and a certain inclined angle is arranged between the door plate and the horizontal plane; the fluid dropping device provides fluid and is arranged to lead the fluid to flow from higher position to lower position along the door plate; and the flow deflector is used for preventing the fluid from flowing into the etching groove and arranged at the lower edge of the opening. The wet etching equipment can be utilized for removing crystals formed by etching liquid at a channel at the inlet of the base plate, and solves the problem that the base plate is scraped, or the crystals drop on t |
| format | Patent |
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The wet etching equipment can be utilized for removing crystals formed by etching liquid at a channel at the inlet of the base plate, and solves the problem that the base plate is scraped, or the crystals drop on t</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
| recordid | cdi_epo_espacenet_CN201520802UU |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE |
| title | Wet etching equipment |
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