Polycrystalline silicon hydrogen reduction furnace

The utility model provides a polycrystalline silicon hydrogen reduction furnace, comprising furnace mantles and a furnace plate, wherein the furnace mantles are provided with cooling devices and are arranged on the furnace plate; an air inlet pipe and an air outlet pipe are distributed on the furnac...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DAI ZIZHONG, ZHANG QIANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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