Polycrystalline silicon hydrogen reduction furnace

The utility model provides a polycrystalline silicon hydrogen reduction furnace, comprising furnace mantles and a furnace plate, wherein the furnace mantles are provided with cooling devices and are arranged on the furnace plate; an air inlet pipe and an air outlet pipe are distributed on the furnac...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: DAI ZIZHONG, ZHANG QIANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The utility model provides a polycrystalline silicon hydrogen reduction furnace, comprising furnace mantles and a furnace plate, wherein the furnace mantles are provided with cooling devices and are arranged on the furnace plate; an air inlet pipe and an air outlet pipe are distributed on the furnace plate, and a spout is arranged on the air inlet end of the air inlet pipe; heating electrodes are arranged on the furnace plate, and silicon core rods are arranged on the heating electrodes in an one-to-one correspondence way; the air inlet pipe arranged at the lower part of the reduction furnace plate is detachably connected with the spout arranged at the upper part of the reduction furnace plate; and the spout is made of graphite; the heating electrodes are fixedly connected with the silicon core rods by graphite clamping heads; flexible graphite gaskets are arranged between the clamping holders of the graphite clamping heads and the silicon core rods, i.e. the flexible graphite gaskets are arranged between the