Injection device of trace gas

The utility model relates to an injection device of trace gas comprising a low-vacuum section, a high-vacuum chamber and an ultrahigh vacuum chamber, wherein a gas storing steel cylinder of the low-vacuum section is connected with a magnetic valve, a thermocouple gauge and a fine tuning valve in ser...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	AN SHUANGLI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING PIPE-LINE SYSTEMS PIPE-LINES STORING OF DISTRIBUTING GASES OR LIQUIDS WEAPONS
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