Mask box

The utility model relates to a mask case, which is used for holding a mask plate.A pattern is formed on the mask plate, the mask case comprises a case body, a case cap, and a supporting part used for supporting the mask plate and arranged on the case body, therein, the supporting part has a contact...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ZHANG LEI, WANG YUEGANG, ZHOU CONGSHU, ZHANG WEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	The utility model relates to a mask case, which is used for holding a mask plate.A pattern is formed on the mask plate, the mask case comprises a case body, a case cap, and a supporting part used for supporting the mask plate and arranged on the case body, therein, the supporting part has a contact end contacted with the mask plate, and a distance is arranged between the contact end and the pattern. The mask case of the utility model can reduce the wearing of the pattern on the mask plate by a supporting frame, the service life of the mask plate is improved, and the error during the optical expose process is reduced.