Organic anti-reflective coating polymer, anti-reflective coating polymer and preparing method thereof

An organic anti-reflective polymer having the following Formula 1, its preparation method, an anti-reflective coating composition comprising the organic anti-reflective polymer and a preparation method of an anti-reflective coating made therefrom. The anti-reflective coating comprising the polymer e...

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Bibliographische Detailangaben
1. Verfasser: HONG SUNG-EUN,JUNG MIN-HO,JUNG JAEANG,LEE GEUN-SU,BAIK KI-HO
Format: Patent
Sprache:eng
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