Control of steam from solid subliming

A vapor delivery system for delivering a steady flow of sublimated vapor to a vacuum chamber comprises a vaporizer of solid material, a mechanical throttling valve, and a pressure gauge, followed by a vapor conduit to the vacuum chamber. The vapor flow rate is determined by both the temperature of t...

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Bibliographische Detailangaben
1. Verfasser: HORSKY THOMAS N.,MILGATE ROBERT W. III
Format: Patent
Sprache:eng
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