Carrying processing device

PROBLEM TO BE SOLVED: To provide a conveying/processing apparatus capable of avoiding a liquid from a wet unit. SOLUTION: An outlet 23 of a decompression chamber 20 has a vertical size set within a range avoiding contact of its top edge with the liquid (developing solution) supplied on the surface o...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	SHIMAI TAI,KAWATA SHIGERU
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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