Semiconductor acceleration sensor

A semiconductor acceleration sensor having beam parts formed in substantially L-shape to surround a weight part, wherein formed to surround a square part, as seen in plan view and constituting the weight part, are two elongated L-shaped beam parts, at locations close to proximal end portions of whic...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	FUKUDA YOSHIHISA,SAKAI KOUJI,ISHIGAMI ATSUSHI,FURUKUBO EIICHI,MESHII RYOSUKE,YAJIMA TAKASHI
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!