Retaining ring with shaped surface

A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping...

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Bibliographische Detailangaben
Hauptverfasser: U,BALAGANI VENKATA R.,ALLEN ADEN MARTIN,FONG MICHAEL JON, CHEN HUNG CHIH,ZUNIGA STEVEN M.,GARRETSON CHARLESC.,MCALLISTER DOUGLAS R.,MEYER STACY,LIN JIAN,HUEY SIDNEY P.,OH JEONGHOON,DOAN TRUNG T.,SCHMIDT JEFFREY,WOHLERT MARTIN S.,HUGHES KERRY F.,WANG JAMES C
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.