Method and device for inspecting surface to be inspected

Method and device for inspecting surface to be inspected

When an irradiation light in a specified pattern is applied onto a surface to be inspected to inspect the surface by a picked-up image of the surface to be inspected in an irradiated state, an irradiation light, that is distributed in a mesh form so as to provide an identical shape in each mesh and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: KUROKI KEISUKE,IWATA MARI,ISHIKAWA CHIE,SAKAGAMI MAMORU
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:When an irradiation light in a specified pattern is applied onto a surface to be inspected to inspect the surface by a picked-up image of the surface to be inspected in an irradiated state, an irradiation light, that is distributed in a mesh form so as to provide an identical shape in each mesh and that has an irradiation area, on a plane vertical to the optical axis, smaller than a non-irradiation area, is applied from an irradiation surface, the surface to be inspected is inspected based on brightness information in the image area, corresponding to the non-irradiation area, of the surface to be inspected in the picked-up image, and an illuminated defect having an intermediate brightness occurring in a dark surface formed in a mesh is extracted as a defect candidate point.