Electrode pad on conductive semiconductor substrate

An electrode pad on a semiconductor substrate is provided. The pad has a small capacitance on an electrode pad part, and permits characteristic impedance of the electrode pad having a practical size to be controlled. On an n-InP substrate (1), a mesa stripe type optical waveguide is formed by stacki...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	AKAGE YUICHI,FUKANO HIDEKI,YAMANAKA TAKAYUKI,SAITOH TADASHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DEVICES USING STIMULATED EMISSION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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