Tubular reaction vessel and process for producing silicon therewith

There is provided a reaction vessel whereby silicon produced can be smoothly recovered dropwise without excessive thermal load on constitutional parts of the reaction vessel, a silicon deposition feedstock gas can be reacted efficiently even when the reaction vessel is scaled up to industrial large-...

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Bibliographische Detailangaben
1. Verfasser: WAKAMATSU SATORU,SUGIMURA SHIGEKI,NAKAMURA YASUO,TSUJIO KENICHI
Format: Patent
Sprache:eng
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