Substrate holding mechanism, substrate polishing apparatus and substrate polishing method
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| creator | TOGAWA TETSUJI,WATANABE TOSHIO,YANO HIROYUKI,TOYODA GEN,IWADE KENJI,TATEYAMA YOSHIKUNI |
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| language | eng |
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| subjects | DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING |
| title | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method |
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