High concentration silica slurry

High concentration silica slurry providing excellent polishing speed and accuracy without impurities contaminations is disclosed. The high concentration silica slurry has a silica concentration of more than 50 % by weight and viscosity of less than 1000 mPa.s, wherein a silica powder is dispersed in...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: MORII TOSHIO,BRANDL PAUL
Format: Patent
Sprache:eng
Schlagworte:
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