Forming of embedded seal cavity in low-temp. co-sintered ceramic

A method for forming a low temperature cofired ceramic (LTCC) device includes forming a channel in a first LTCC tape layer. A wax is inserted in the channel. The wax is of a type that burns out at a temperature below a sintering temperature of the first LTCC tape layer. At least a second LTCC tape l...

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Bibliographische Detailangaben

Hauptverfasser:	R.T. PIKE, B.R. SMITH, C.M. NEWTON
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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