Film piezoelectric element and manufacturing method thereof and executive component using the piezoelectric element

An actuator comprises first and second structures each with a piezoelectric layer sandwiched between a main electrode layer and an opposed electrode layer, which structures are formed on two substrates, respectively. A first main electrode layer and a first opposed electrode layer are provided with...

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Bibliographische Detailangaben

1. Verfasser:	UCHIYAMA HIROICHI
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER PHYSICS
Online-Zugang:	Volltext bestellen
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