Film piezoelectric element and its manufacture method and actuator

A piezoelectric thin-film element small in leakage current between electrode metal films and its manufacturing method are presented, the piezoelectric thin-film element comprises at least one laminated body composed of a piezoelectric thin-film (4) having mutually facing first surface (4a) and secon...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KITA HIROYUKI UCHIYAMA HIROICHI
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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