Laser system

In a laser system for laser crystallization of semiconductor films, a laser source produces a laser beam that is transmitted to a lens system having a plurality of lens elements adapted to divide the beam into a plurality of beamlets. At least one of the beamlets is inverted relative to the others,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	J.A. CLARKE, D.J. MCCULLOCH
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING DEVICES USING STIMULATED EMISSION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	In a laser system for laser crystallization of semiconductor films, a laser source produces a laser beam that is transmitted to a lens system having a plurality of lens elements adapted to divide the beam into a plurality of beamlets. At least one of the beamlets is inverted relative to the others, such that a desired intensity profile is generated at the output of the laser system.