Method for monitoring distribution of structures on surface or of particles in space

The invention relates to a method for monitoring the distribution of structures on a surface or of particles in space. An optical image of the distribution is produced using video technology, for example. This image is then broken down into pixels, the average brightness of each pixel is determined,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ULRICH PEGELOW, ELKE SCHOLL, BERNHARD GUKENBIEHL
Format: Patent
Sprache:eng
Schlagworte:
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