Control of process timing during manufacturing of magnetic thin film disks

A method is presented for controlling process delay times between a) thin film deposition and lubricant application, and b) lubricant application and abrasive polishing. Applicants have discovered that for certain lubricants, a minimum delay time after the overcoat has been deposited before the lubr...

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Bibliographische Detailangaben
1. Verfasser: GIORGI ALAN P.,GREEN PAUL M.,HELF GARTH W.,O'BRIEN ERIC C.,PAN QIN,SMITH ANTHONY L.,WALTMAN ROBERT J
Format: Patent
Sprache:eng
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