Computer vision based test apparatus and method for micro electro-mechanical systems

Computer vision based test apparatus and method for micro electro-mechanical systems

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1. Verfasser: XIAOTANG,FENG HU
Format: Patent
Sprache:eng
Schlagworte:
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN1260116CC</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN1260116CC</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN1260116CC3</originalsourceid><addsrcrecordid>eNqNykEKwjAQBdBsXIh6h7lAwSr0AkFx5ar7Mqa_NJBkQmYqeHs3HsDV27y9G73kuhkavaNGKfRixUwGNeJaubFtSlxmyrBVZlqkUY6hCSEhWJMuI6xcYuBE-lFD1qPbLZwUp58HR_fb6B8dqkzQygEFNvlnfxnOfT94f_2jfAFfljjp</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Computer vision based test apparatus and method for micro electro-mechanical systems</title><source>esp@cenet</source><creator>XIAOTANG,FENG HU</creator><creatorcontrib>XIAOTANG,FENG HU</creatorcontrib><language>eng</language><subject>MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; TRANSPORTING</subject><creationdate>2006</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20060621&amp;DB=EPODOC&amp;CC=CN&amp;NR=1260116C$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20060621&amp;DB=EPODOC&amp;CC=CN&amp;NR=1260116C$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>XIAOTANG,FENG HU</creatorcontrib><title>Computer vision based test apparatus and method for micro electro-mechanical systems</title><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2006</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNykEKwjAQBdBsXIh6h7lAwSr0AkFx5ar7Mqa_NJBkQmYqeHs3HsDV27y9G73kuhkavaNGKfRixUwGNeJaubFtSlxmyrBVZlqkUY6hCSEhWJMuI6xcYuBE-lFD1qPbLZwUp58HR_fb6B8dqkzQygEFNvlnfxnOfT94f_2jfAFfljjp</recordid><startdate>20060621</startdate><enddate>20060621</enddate><creator>XIAOTANG,FENG HU</creator><scope>EVB</scope></search><sort><creationdate>20060621</creationdate><title>Computer vision based test apparatus and method for micro electro-mechanical systems</title><author>XIAOTANG,FENG HU</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN1260116CC3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2006</creationdate><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>XIAOTANG,FENG HU</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>XIAOTANG,FENG HU</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Computer vision based test apparatus and method for micro electro-mechanical systems</title><date>2006-06-21</date><risdate>2006</risdate><oa>free_for_read</oa></addata></record>
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subjects MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
title Computer vision based test apparatus and method for micro electro-mechanical systems
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T08%3A08%3A13IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=XIAOTANG,FENG%20HU&rft.date=2006-06-21&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN1260116CC%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true