Detector

Provided is an apparatus for accurately sensing the position of a moving object in two dimensions as well as a change in the attitude of the object when the object is moving. The apparatus includes a scale and at least one angle sensor. The scale is constituted by an angular grid, which is formed on...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	SEINO SATORU
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TARIFF METERING APPARATUS TESTING
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Beschreibung
Zusammenfassung:	Provided is an apparatus for accurately sensing the position of a moving object in two dimensions as well as a change in the attitude of the object when the object is moving. The apparatus includes a scale and at least one angle sensor. The scale is constituted by an angular grid, which is formed on the surface of a scale substrate inclusive of a planar surface and freely curved surface thereof, and which has an angle-related property that varies in two different directions (the x and y directions) in the form of a known function. The angle sensor is arranged so as to confront the angular grid surface of the scale. Either the scale or the angle sensor is mounted on a moving object and the position of the moving object in two-dimensional coordinates is sensed during relative movement between the scale and the angle sensor.