Perfluorocompound separation and purification method and system

Provided is a novel method and system for separating and purifying perfluorocompounds (PFCs). The method comprises the steps of: (a) introducing a perfluorocompound-containing gas stream into a first distillation column; (b) removing a light product from the first column, and removing a heavy produc...

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Bibliographische Detailangaben
Hauptverfasser: BAO HA, TIMOTHY ARCURI
Format: Patent
Sprache:eng
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