Metal mask plate and coating method thereof
The invention provides a metal mask plate and a coating method thereof, different surfaces of the metal mask plate are coated to form insulating film layers, and the coating method specifically comprises the following steps: forming an upper surface insulating film layer on the upper surface of the...
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| creator | ZHI QIDONG YU YANG LYU LIXIN |
| description | The invention provides a metal mask plate and a coating method thereof, different surfaces of the metal mask plate are coated to form insulating film layers, and the coating method specifically comprises the following steps: forming an upper surface insulating film layer on the upper surface of the metal mask plate, and forming a lower surface insulating film layer on the lower surface of the metal mask plate; wherein the nominal thickness of the lower surface insulating film layer is larger than that of the upper surface insulating film layer, and the thickness difference is 10%-40% of the thickness of the upper surface insulating film layer; the metal mask plate is at least used for forming a packaging layer in an OLED production process. Compared with the prior art, according to the scheme, the deformation of sagging/opening morphology occurring in the film coating process and/or after film coating of the metal mask plate can be obviously optimized. And in an ideal state, the net surface sagging morphology |
| format | Patent |
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Compared with the prior art, according to the scheme, the deformation of sagging/opening morphology occurring in the film coating process and/or after film coating of the metal mask plate can be obviously optimized. And in an ideal state, the net surface sagging morphology</description><language>chi ; eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20241001&DB=EPODOC&CC=CN&NR=118726902A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25544,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20241001&DB=EPODOC&CC=CN&NR=118726902A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ZHI QIDONG</creatorcontrib><creatorcontrib>YU YANG</creatorcontrib><creatorcontrib>LYU LIXIN</creatorcontrib><title>Metal mask plate and coating method thereof</title><description>The invention provides a metal mask plate and a coating method thereof, different surfaces of the metal mask plate are coated to form insulating film layers, and the coating method specifically comprises the following steps: forming an upper surface insulating film layer on the upper surface of the metal mask plate, and forming a lower surface insulating film layer on the lower surface of the metal mask plate; wherein the nominal thickness of the lower surface insulating film layer is larger than that of the upper surface insulating film layer, and the thickness difference is 10%-40% of the thickness of the upper surface insulating film layer; the metal mask plate is at least used for forming a packaging layer in an OLED production process. 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And in an ideal state, the net surface sagging morphology</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZND2TS1JzFHITSzOVijISSxJVUjMS1FIzk8sycxLV8hNLcnIT1EoyUgtSs1P42FgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8c5-hoYW5kZmlgZGjsbEqAEAN0QpFQ</recordid><startdate>20241001</startdate><enddate>20241001</enddate><creator>ZHI QIDONG</creator><creator>YU YANG</creator><creator>LYU LIXIN</creator><scope>EVB</scope></search><sort><creationdate>20241001</creationdate><title>Metal mask plate and coating method thereof</title><author>ZHI QIDONG ; YU YANG ; LYU LIXIN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN118726902A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2024</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>ZHI QIDONG</creatorcontrib><creatorcontrib>YU YANG</creatorcontrib><creatorcontrib>LYU LIXIN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ZHI QIDONG</au><au>YU YANG</au><au>LYU LIXIN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Metal mask plate and coating method thereof</title><date>2024-10-01</date><risdate>2024</risdate><abstract>The invention provides a metal mask plate and a coating method thereof, different surfaces of the metal mask plate are coated to form insulating film layers, and the coating method specifically comprises the following steps: forming an upper surface insulating film layer on the upper surface of the metal mask plate, and forming a lower surface insulating film layer on the lower surface of the metal mask plate; wherein the nominal thickness of the lower surface insulating film layer is larger than that of the upper surface insulating film layer, and the thickness difference is 10%-40% of the thickness of the upper surface insulating film layer; the metal mask plate is at least used for forming a packaging layer in an OLED production process. Compared with the prior art, according to the scheme, the deformation of sagging/opening morphology occurring in the film coating process and/or after film coating of the metal mask plate can be obviously optimized. And in an ideal state, the net surface sagging morphology</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Metal mask plate and coating method thereof |
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