CMUTs-based fluorescence-quality dual-response gas detection sensor, system and method

The invention belongs to the technical field of MEMS gas sensors, and discloses a CMUTs-based fluorescence-quality dual-response gas detection sensor, system and method, the sensor comprises CMUTs, the CMUTs are provided with a vibration film and a cavity, the surface of the vibration film is provid...

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Bibliographische Detailangaben
Hauptverfasser:	ZHAO LIBO, ZHAO YIHE, YUAN JIAWEI, LI ZHIKANG, WANG TONG, QIN SHAOHUI, WANG JIAXIANG, LU JIJIAN, WANG BIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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